System identification and control parameter optimization for a stylus profiler with exchangeable cantilevers

Stylus instruments are widely used in production metrology due to their robustness. Interchangeable cantilevers allow a wide range of measuring tasks to be covered with one measuring device. When approaching the sample, the positioning of the stylus instrument tip relative to the measurement object...

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Bibliographic Details

Published in:	Engineering Science and Technology, an International Journal
Main Authors:	Felix Ströer, Katharina Trinkaus, Indek Raid, Jörg Seewig
Format:	Article
Language:	English
Published:	Elsevier 2018-02-01
Subjects:	Stylus instrument System identification Automated closed-loop control Optimal closed-loop control parameters
Online Access:	http://www.sciencedirect.com/science/article/pii/S2215098617313216