Utilizing the Intrinsic Mode of Weakly Coupled Resonators for Temperature Compensation

Accelerometers based on outputting amplitude ratios in weakly coupled resonators (WCRs) are attractive because their parametric sensitivity is higher by two or three orders of magnitudes than those based on outputting frequency. However, the impact of temperature on the coupler is a key factor in ac...

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Bibliographic Details
Published in:Micromachines
Main Authors: Kunfeng Wang, Xingyin Xiong, Zheng Wang, Pengcheng Cai, Liangbo Ma, Xudong Zou
Format: Article
Language:English
Published: MDPI AG 2022-09-01
Subjects:
MEMS
mode localization
accelerometer
temperature compensation
Online Access:https://www.mdpi.com/2072-666X/13/9/1447

Internet

https://www.mdpi.com/2072-666X/13/9/1447

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