Experimental Investigation of Tip Wear of AFM Monocrystalline Silicon Probes

AFM has a wide range of applications in nanostructure scanning imaging and fabrication. The wear of AFM probes has a significant impact on the accuracy of nanostructure measurement and fabrication, which is particularly significant in the process of nanomachining. Therefore, this paper focuses on th...

Full description

Bibliographic Details

Published in:	Sensors
Main Authors:	Song Huang, Yanling Tian, Tao Wang
Format:	Article
Language:	English
Published:	MDPI AG 2023-04-01
Subjects:	AFM probe probe wear nanomachining wear process machining quality
Online Access:	https://www.mdpi.com/1424-8220/23/8/4084