A Sacrificial Porous Silicon Layer-Based Resistive Chemical Vapor Sensor
In this study, a resistive gas sensor based on a sacrificial porous silicon layer was fabricated and investigated for its capability to detect various volatile organic compounds (VOCs) at room temperature. The porous structure was formed via electrochemical anodization of low-resistivity p-type crys...
| 出版年: | IEEE Access |
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| 主要な著者: | , |
| フォーマット: | 論文 |
| 言語: | 英語 |
| 出版事項: |
IEEE
2025-01-01
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| 主題: | |
| オンライン･アクセス: | https://ieeexplore.ieee.org/document/11186808/ |