Finite Element Study for Mass Sensitivity of Love Surface Acoustic Wave Sensor with Si₃N₄-SiO₂ Double-Covered Waveguiding Layer

Love surface acoustic wave (L-SAW) sensors are miniaturized, easy to integrate, and suitable for detection in liquid environments. In this paper, an L-SAW sensor with a thin Si₃N₄-SiO₂ double-covered layer was proposed for samples...

Full description

Bibliographic Details

Published in:	Micromachines
Main Authors:	Luming Li, Mingyong Zhou, Lei Huang, Bingyan Jiang
Format:	Article
Language:	English
Published:	MDPI AG 2023-08-01
Subjects:	L-SAW double-covered waveguiding layer mass sensitivity finite element method (FEM)
Online Access:	https://www.mdpi.com/2072-666X/14/9/1696