Optical System Design and Characterization of MEMS Mirror-Based SPAD LiDAR System for Smart Factory Applications

This paper presents the optical system design for the MEMS mirror-based SPAD LiDAR system. The transmitter of the proposed LiDAR system consists of related optics for incident beam expansion and a piezoelectric MEMS mirror for a wide-scanning field of view. For the receiver unit, an SPAD array is ut...

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發表在:	Proceedings
Main Authors:	Jeong-Yeon Hwang, Paul Raschdorf, Andre Henschke, Manuel Ligges, Sara Weyer, Shanshan Gu-Stoppel
格式:	Article
語言:	英语
出版:	MDPI AG 2024-03-01
主題:	light detection and ranging (LiDAR) laser beam scanning microelectromechanical systems (MEMS) mirror single-photon avalanche diode (SPAD) optical design
在線閱讀:	https://www.mdpi.com/2504-3900/97/1/112