Study on the Influence of Sapphire Crystal Orientation on Its Chemical Mechanical Polishing

Sapphire has been the most widely used substrate material in LEDs, and the demand for non-C-planes crystal is increasing. In this paper, four crystal planes of the A-, C-, M- and R-plane were selected as the research objects. Nanoindentation technology and chemical mechanical polishing technology we...

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Bibliographic Details

Published in:	Applied Sciences
Main Authors:	Linlin Cao, Xiang Zhang, Julong Yuan, Luguang Guo, Teng Hong, Wei Hang, Yi Ma
Format:	Article
Language:	English
Published:	MDPI AG 2020-11-01
Subjects:	sapphire crystal orientation anisotropy polishing
Online Access:	https://www.mdpi.com/2076-3417/10/22/8065