SV-SAW RF filters based on low-cost 128°Y LiNbO3/SiO2/poly-Si/Si substrate for 6G cmWave wireless communications

Abstract Recent advancements in mobile communication have escalated the demand for faster data rates, requiring higher carrier frequencies and compact, high-performance, and low-cost radio frequency (RF) filters. Micro-acoustic resonators offer significant advantages in mobile phone filtering due to...

Full description

Bibliographic Details

Published in:	Microsystems & Nanoengineering
Main Authors:	Kai Yang, Jie Chen, Juan Wang, Fuhong Lin, Jiming Fang, Meijuan Li, JunYan Zheng, Zijun Ren, Fangsheng Qian, Haiding Sun, Yansong Yang, Chengjie Zuo
Format:	Article
Language:	English
Published:	Nature Publishing Group 2025-05-01
Online Access:	https://doi.org/10.1038/s41378-025-00949-9