A MEMS Micro Force Sensor Based on A Laterally Movable Gate Field-Effect Transistor (LMGFET) with A Novel Decoupling Sandwich Structure

This paper presents the development of a novel micro force sensor based on a laterally movable gate field-effect transistor (LMGFET). A precise electrical model is proposed for the performance evaluation of small-scale LMGFET devices and exhibits improved accuracy in comparison with previous models....

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Bibliographic Details

Published in:	Engineering
Main Authors:	Wendi Gao, Zhixia Qiao, Xiangguang Han, Xiaozhang Wang, Adnan Shakoor, Cunlang Liu, Dejiang Lu, Ping Yang, Libo Zhao, Yonglu Wang, Jiuhong Wang, Zhuangde Jiang, Dong Sun
Format:	Article
Language:	English
Published:	Elsevier 2023-02-01
Subjects:	Force sensor Laterally movable gate Field-effect transistor Photoresistive SU-8 Biomedical micromanipulation
Online Access:	http://www.sciencedirect.com/science/article/pii/S2095809922005628