Design and Implementation of a Four-Unit Array Piezoelectric Bionic MEMS Vector Hydrophone

High-performance vector hydrophones have been gaining attention for underwater target-monitoring applications. Nevertheless, there exists the mutual constraint between sensitivity and bandwidth of a single hydrophone. To solve this problem, a four-unit array piezoelectric bionic MEMS vector hydropho...

Full description

Bibliographic Details
Published in:Micromachines
Main Authors: Shuzheng Shi, Xiaoyong Zhang, Zhanying Wang, Liyong Ma, Kai Kang, Yongjun Pang, Hong Ma, Jinjiang Hu
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Subjects:
PZT
MEMS
array vector hydrophone
bionic structure
sensitivity
Online Access:https://www.mdpi.com/2072-666X/15/4/524

Internet

https://www.mdpi.com/2072-666X/15/4/524

Similar Items