Preparation and growth mechanism of ultra-thin free-standing polycrystalline diamond film based on glass carbon substrate

In these experiments, Ti, Si and glass carbon substrates were selected to prepare ultra-thin polycrystalline diamond films by microwave plasma chemical vapor deposition (MPCVD) using CH4/H2 as the reaction source. The overall morphology, surface morphology, composition and stress state of the prepar...

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Bibliographic Details

Published in:	Jin'gangshi yu moliao moju gongcheng
Main Authors:	Xiao XIONG, Bing WANG, Ying XIONG, Guodong WU
Format:	Article
Language:	Chinese
Published:	Zhengzhou Research Institute for Abrasives & Grinding Co., Ltd. 2023-10-01
Subjects:	ultra-thin diamond film free-standing glass carbon substrate film-substrate separation growth mechanism mpcvd
Online Access:	http://www.jgszz.cn/article/doi/10.13394/j.cnki.jgszz.2023.0005