Piezoelectric Micromachined Ultrasonic Transducer-Integrated Helmholtz Resonator with Microliter-Sized Volume-Tunable Cavity

In this study, a piezoelectric micromachined ultrasonic transducer (PMUT) is integrated with a microliter-sized volume-tunable Helmholtz resonator. The passive Helmholtz resonator is constructed using an SU8 photolithography-defined square opening plate as the neck portion, a 3D-printed hollow struc...

Full description

Bibliographic Details

Published in:	Sensors
Main Authors:	Guo-Hua Feng, Wen-Sheng Chen
Format:	Article
Language:	English
Published:	MDPI AG 2022-10-01
Subjects:	Helmholtz resonator piezoelectric film two-term power series curve ultrasonic volume-tunable cavity
Online Access:	https://www.mdpi.com/1424-8220/22/19/7471