The Microscopic Origin of Residual Stress for Flat Self-Actuating Piezoelectric Cantilevers
<p>Abstract</p> <p>In this study, flat piezoelectric microcantilevers were fabricated under low-stress Pb(Zr<sub>0.52</sub>Ti<sub>0.48</sub>)O<sub>3</sub> (PZT) film conditions. They were analyzed using the Raman spectrum and wafer curvature meth...
| Published in: | Nanoscale Research Letters |
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| Main Authors: | , , |
| Format: | Article |
| Language: | English |
| Published: |
SpringerOpen
2011-01-01
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| Subjects: | |
| Online Access: | http://www.nanoscalereslett.com/content/6/1/55 |