The Preparation and Properties of Volatile Tris(N‑Alkoxycarboxamidato)chromium(III) Complexes as Potential Single-Source Precursors for the MOCVD of Crystalline Chromium Oxide Thin Films

Bibliographic Details
Published in:ACS Omega
Main Authors: Ji Hun Kim, Da Som Song, Sunyoung Shin, Ji Yeon Ryu, Duk-Young Jung, Jongsun Lim, Chang Gyoun Kim
Format: Article
Language:English
Published: American Chemical Society 2025-05-01
Online Access:https://doi.org/10.1021/acsomega.5c00380