Turning the optical properties of microcrystalline diamond films by boron ion implantation and annealing

We investigated the correlation between microstructures and optical properties of boron ion implanted microcrystalline diamond (B-MCD) thin films annealed at different temperatures. Ellipsometry characterization of B-MCD films was performed in the wavelength range of 380–1000 nm and the disperse par...

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Bibliographic Details

Published in:	Functional Diamond
Main Authors:	Dan Dai, Jiale Wang, Chengke Chen, Haitao Ye, Nianhua Peng, Jinping Pan, Xiaojun Hu
Format:	Article
Language:	English
Published:	Taylor & Francis Group 2024-12-01
Subjects:	microcrystalline diamond boron ion implanted annealing refractive index
Online Access:	http://dx.doi.org/10.1080/26941112.2024.2330460