Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications

We present the feasibility in fabricating membranes and cantilevers made of diamond grown on Si/SiO<sub>2</sub> substrates by femtosecond laser ablation. In the ablation process, we generated nano- and microstructures on the membrane surface. Such laser-induced periodic surface structure...

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Bibliographic Details
Published in:Proceedings
Main Authors: Johann Zehetner, Alexander Kromka, Tibor Izsák, Gabriel Vanko, Lenka Gajdošová, Stephan Kasemann
Format: Article
Language:English
Published: MDPI AG 2020-12-01
Subjects:
MEMS
diamond
laser ablation
laser-induced periodic surface structures
Online Access:https://www.mdpi.com/2504-3900/56/1/13

Internet

https://www.mdpi.com/2504-3900/56/1/13

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