Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications
We present the feasibility in fabricating membranes and cantilevers made of diamond grown on Si/SiO<sub>2</sub> substrates by femtosecond laser ablation. In the ablation process, we generated nano- and microstructures on the membrane surface. Such laser-induced periodic surface structure...
| Published in: | Proceedings |
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| Main Authors: | , , , , , |
| Format: | Article |
| Language: | English |
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MDPI AG
2020-12-01
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| Online Access: | https://www.mdpi.com/2504-3900/56/1/13 |
| _version_ | 1850346560181764096 |
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| author | Johann Zehetner Alexander Kromka Tibor Izsák Gabriel Vanko Lenka Gajdošová Stephan Kasemann |
| author_facet | Johann Zehetner Alexander Kromka Tibor Izsák Gabriel Vanko Lenka Gajdošová Stephan Kasemann |
| author_sort | Johann Zehetner |
| collection | DOAJ |
| container_title | Proceedings |
| description | We present the feasibility in fabricating membranes and cantilevers made of diamond grown on Si/SiO<sub>2</sub> substrates by femtosecond laser ablation. In the ablation process, we generated nano- and microstructures on the membrane surface. Such laser-induced periodic surface structures (LIPSS) are useful in tailoring the surface chemistry. In combination with wet or reactive ion etching, smooth membranes were generated. |
| format | Article |
| id | doaj-art-92d6dc62c8a74e528ce4ec6cbe02a38d |
| institution | Directory of Open Access Journals |
| issn | 2504-3900 |
| language | English |
| publishDate | 2020-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| spelling | doaj-art-92d6dc62c8a74e528ce4ec6cbe02a38d2025-08-19T23:11:54ZengMDPI AGProceedings2504-39002020-12-015611310.3390/proceedings2020056013Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor ApplicationsJohann Zehetner0Alexander Kromka1Tibor Izsák2Gabriel Vanko3Lenka Gajdošová4Stephan Kasemann5Research Center for Microtechnology, Vorarlberg University of Applied Sciences, 6850 Dornbirn, AustriaInstitute of Physics, Czech Academy of Sciences, 162 00 Prague 6, Czech RepublicInstitute of Physics, Czech Academy of Sciences, 162 00 Prague 6, Czech RepublicInstitute of Electrical Engineering, Slovak Academy of Sciences, 841 04 Bratislava, SlovakiaResearch Center for Microtechnology, Vorarlberg University of Applied Sciences, 6850 Dornbirn, AustriaResearch Center for Microtechnology, Vorarlberg University of Applied Sciences, 6850 Dornbirn, AustriaWe present the feasibility in fabricating membranes and cantilevers made of diamond grown on Si/SiO<sub>2</sub> substrates by femtosecond laser ablation. In the ablation process, we generated nano- and microstructures on the membrane surface. Such laser-induced periodic surface structures (LIPSS) are useful in tailoring the surface chemistry. In combination with wet or reactive ion etching, smooth membranes were generated.https://www.mdpi.com/2504-3900/56/1/13MEMSdiamondlaser ablationlaser-induced periodic surface structures |
| spellingShingle | Johann Zehetner Alexander Kromka Tibor Izsák Gabriel Vanko Lenka Gajdošová Stephan Kasemann Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications MEMS diamond laser ablation laser-induced periodic surface structures |
| title | Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications |
| title_full | Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications |
| title_fullStr | Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications |
| title_full_unstemmed | Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications |
| title_short | Fabrication of Diamond Membranes by Femtosecond Laser Ablation for MEMS Sensor Applications |
| title_sort | fabrication of diamond membranes by femtosecond laser ablation for mems sensor applications |
| topic | MEMS diamond laser ablation laser-induced periodic surface structures |
| url | https://www.mdpi.com/2504-3900/56/1/13 |
| work_keys_str_mv | AT johannzehetner fabricationofdiamondmembranesbyfemtosecondlaserablationformemssensorapplications AT alexanderkromka fabricationofdiamondmembranesbyfemtosecondlaserablationformemssensorapplications AT tiborizsak fabricationofdiamondmembranesbyfemtosecondlaserablationformemssensorapplications AT gabrielvanko fabricationofdiamondmembranesbyfemtosecondlaserablationformemssensorapplications AT lenkagajdosova fabricationofdiamondmembranesbyfemtosecondlaserablationformemssensorapplications AT stephankasemann fabricationofdiamondmembranesbyfemtosecondlaserablationformemssensorapplications |