Physically-Based Reduced Order Modelling of a Uni-Axial Polysilicon MEMS Accelerometer

In this paper, the mechanical response of a commercial off-the-shelf, uni-axial polysilicon MEMS accelerometer subject to drops is numerically investigated. To speed up the calculations, a simplified physically-based (beams and plate), two degrees of freedom model of the movable parts of the sensor...

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Bibliographic Details

Published in:	Sensors
Main Authors:	Sarah Zerbini, Alberto Corigliano, Stefano Mariani, Aldo Ghisi
Format:	Article
Language:	English
Published:	MDPI AG 2012-10-01
Subjects:	MEMS inertial sensors reduced order modelling shocks and drops polysilicon
Online Access:	http://www.mdpi.com/1424-8220/12/10/13985