Wideband dielectric properties of silicon and glass substrates for terahertz integrated circuits and microsystems

This paper presents a comprehensive study of the optical and electrical dielectric material properties of six commonly-used silicon and glass substrates at terahertz (THz) frequencies, including refractive index, absorption coefficient, dielectric constant and loss factor. The material characterizat...

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Bibliographic Details

Published in:	Materials Research Express
Main Authors:	Nonchanutt Chudpooti, Nattapong Duangrit, Andrew D Burnett, Joshua R Freeman, Thomas B Gill, Chuwong Phongcharoenpanich, Ulrik Imberg, Danai Torrungrueng, Prayoot Akkaraekthalin, Ian D Robertson, Nutapong Somjit
Format:	Article
Language:	English
Published:	IOP Publishing 2021-01-01
Subjects:	THz time-domain spectroscopy material characterization dielectric properties electrical properties
Online Access:	https://doi.org/10.1088/2053-1591/abf684