Fabrication of High Sensitivity Carbon Microcoil Pressure Sensors

This work demonstrates a highly sensitive pressure sensor that was fabricated using carbon microcoils (CMCs) and polydimethylsiloxane (PDMS). CMCs were grown by chemical vapor deposition using various ratios of Fe-Sn catalytic solution. The pressure sensor has a sandwiched structure, in which the as...

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Bibliographic Details
Published in:Sensors
Main Authors: Shuo-Hung Chang, Chen-Hung Li, Feng Gao, Neng-Kai Chang, Chih-Chung Su
Format: Article
Language:English
Published: MDPI AG 2012-07-01
Subjects:
carbon microcoils
flexible sensor
chemical vapor deposition
Online Access:http://www.mdpi.com/1424-8220/12/8/10034

Internet

http://www.mdpi.com/1424-8220/12/8/10034

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