Quantitative Evaluation of Dielectric Breakdown of Silicon Micro- and Nanofluidic Devices for Electrophoretic Transport of a Single DNA Molecule

In the present study, we quantitatively evaluated dielectric breakdown in silicon-based micro- and nanofluidic devices under practical electrophoretic conditions by changing the thickness of the insulating layer. At higher buffer concentration, a silicon nanofluidic device with a 100 nm or 250 nm si...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Mamiko Sano, Noritada Kaji, Qiong Wu, Toyohiro Naito, Takao Yasui, Masateru Taniguchi, Tomoji Kawai, Yoshinobu Baba
Format:	Article
Language:	English
Published:	MDPI AG 2018-04-01
Subjects:	dielectric breakdown insulation silicon devices DNA electrophoresis
Online Access:	http://www.mdpi.com/2072-666X/9/4/180