Semiconductor cleaning technology for next generation material systems
This paper gives a brief overview of the challenges wafer cleaning technology is facing in the light of advanced silicon technology moving in the direction of non-planar device structures and the need for modified cleans for semiconductors other than silicon. In the former case, the key issue is re...
| Published in: | Journal of Telecommunications and Information Technology |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
National Institute of Telecommunications
2023-06-01
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| Subjects: | |
| Online Access: | https://jtit.pl/jtit/article/view/807 |