Fully bulk CMOS compatible Key Shape Floating Body Memory (KFBM)

This paper presents a capacitorless memory cell with bulk CMOS compatibility, consisting of a MOSFET with a virtual floating body formed by the trench. The name Key shape Floating Body Memory (KFBM) is derived from the resemblance of the structure to the shape of an antique key. The carrier concentr...

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Bibliographic Details

Published in:	Memories - Materials, Devices, Circuits and Systems
Main Authors:	Masakazu Kakumu, Yisuo Li, Koji Sakui, Nozomu Harada
Format:	Article
Language:	English
Published:	Elsevier 2023-07-01
Subjects:	Floating body memory KFBM CMOS compatibility DRAM Flash 4F2
Online Access:	http://www.sciencedirect.com/science/article/pii/S2773064623000385