Exploration of a Novel Electric-Fuse Device with a Simple Structure of Ni Metal on a SiO₂ Dielectric for Electrostatic Discharge Protection under a Human Body Model

On-chip electrostatic discharge (ESD) protection poses a challenge in the chip fabrication process. In this study, a novel electric fuse (E-fuse) device featuring a simple structure of Ni metal on a SiO₂ dielectric for ESD protection was proposed, and the physical mechanism of...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	He Guan, Jiaying Li, Yangchao Chen, Yongchuan Tang, Yunshuo Li
Format:	Article
Language:	English
Published:	MDPI AG 2024-09-01
Subjects:	electrostatic discharge electric fuse transmission line pulse
Online Access:	https://www.mdpi.com/2072-666X/15/9/1163