Thermally Evaporated Tin Oxide Thin Film for Gas Sensing Applications
In this study tin oxide thin film is deposited on glass substrate by Thermal Evaporation technique for gas sensing applications. While deposition the distance between source and the substrate is maintained at 8cm, the pressure of the chamber is kept at 2.5 10 – 5 torr and rate of deposition is abo...
| Published in: | Журнал нано- та електронної фізики |
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| Main Authors: | , |
| Format: | Article |
| Language: | English |
| Published: |
Sumy State University
2017-04-01
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| Subjects: | |
| Online Access: | http://jnep.sumdu.edu.ua/download/numbers/2017/2/articles/jnep_V9_02019.pdf |