Ultrathin Flexible Encapsulation Materials Based on Al₂O₃/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors

Ultrathin flexible encapsulation (UFE) using multilayered films has prospects for practical applications, such as implantable and wearable electronics. However, existing investigations of the effect of mechanical bending strains on electrical properties after the encapsulation procedure provide insu...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Zhuofan Wang, Hongliang Lu, Yuming Zhang, Chen Liu, Haonan Zhang, Yanhao Yu
Format:	Article
Language:	English
Published:	MDPI AG 2023-12-01
Subjects:	ultrathin flexible encapsulation Al<sub>2</sub>O<sub>3</sub>/alucone silicon nanomembrane metal-oxide-semiconductor capacitors electrical stability
Online Access:	https://www.mdpi.com/2072-666X/15/1/41