Wang, Z., Lu, H., Zhang, Y., Liu, C., Zhang, H., & Yu, Y. (2023, December). Ultrathin Flexible Encapsulation Materials Based on Al<sub>2</sub>O<sub>3</sub>/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors. Micromachines.
Chicagoスタイル(17版)引用形式Wang, Zhuofan, Hongliang Lu, Yuming Zhang, Chen Liu, Haonan Zhang, , Yanhao Yu. "Ultrathin Flexible Encapsulation Materials Based on Al2O3/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors." Micromachines Dec. 2023.
MLA(9版)引用形式Wang, Zhuofan, et al. "Ultrathin Flexible Encapsulation Materials Based on Al2O3/Alucone Nanolaminates for Improved Electrical Stability of Silicon Nanomembrane-Based MOS Capacitors." Micromachines, Dec. 2023.