Impact of Internal Faraday Shields on RF Driven Hydrogen Discharges

At RF plasma reactors operated at high power, internal Faraday shields are required to shield dielectric vessel or windows from erosion due to isotropic heat and particle fluxes. By utilizing a flexible and diagnostically well-equipped laboratory setup, crucial effects that accompany the application...

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Bibliographic Details

Published in:	Plasma
Main Authors:	David Rauner, Dominikus Zielke, Stefan Briefi, Ursel Fantz
Format:	Article
Language:	English
Published:	MDPI AG 2022-06-01
Subjects:	radio frequency discharge hydrogen Faraday shield inductively coupled plasma helicon power transfer efficiency
Online Access:	https://www.mdpi.com/2571-6182/5/3/22