Xenon Plasma Focused Ion Beam Milling for Obtaining Soft X-ray Transparent Samples

We employ xenon (Xe) plasma focused ion beam (PFIB) milling to obtain soft X-ray transparent windows out of bulk samples. The use of a Xe PFIB allows for the milling of thin windows (several 100 nm thick) with areas of the order of 100 µm × 100 µm into bulk substrates. In addition, we present an app...

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Bibliographic Details

Published in:	Crystals
Main Authors:	Sina Mayr, Simone Finizio, Joakim Reuteler, Stefan Stutz, Carsten Dubs, Markus Weigand, Aleš Hrabec, Jörg Raabe, Sebastian Wintz
Format:	Article
Language:	English
Published:	MDPI AG 2021-05-01
Subjects:	Xe plasma focused ion beam soft X-ray transparency transmission X-ray microscopy
Online Access:	https://www.mdpi.com/2073-4352/11/5/546