Electro-thermal numerical analysis of microbolometer over various kinds of design structure under adjustable thermal conductance in the Microeletromechanical system

The microbolometer is an important device that has a variety of civilian, industrial, and military applications, especially in remote sensing and night vision. Microbolometers are sensor elements in uncooled infrared sensors, which makes the uncooled infrared sensors have the advantage of being smal...

وصف كامل

التفاصيل البيبلوغرافية
الحاوية / القاعدة:Heliyon
المؤلفون الرئيسيون: Yanan Xu, Mukti Rana, Kevin Díaz-Aponte
التنسيق: مقال
اللغة:الإنجليزية
منشور في: Elsevier 2023-04-01
الموضوعات:
الوصول للمادة أونلاين:http://www.sciencedirect.com/science/article/pii/S2405844023020935