Influence of The Substrate-Target Angle and Sputter Temperature On The Properties of CIGS Thin Films Sputtered From Single Quaternary Target

In this study, Copper Indium Gallium Selenide (CIGS) thin films were successfully sputtered from a single quaternary target onto soda lime glass substrates. The effect of the incident angle of target atoms and sputter temperature on the properties of the films were examined using various techniques....

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Bibliographic Details

Published in:	Cumhuriyet Science Journal
Main Authors:	Filiz Keleş, Furkan Güçlüer
Format:	Article
Language:	English
Published:	Sivas Cumhuriyet Üniversitesi 2023-06-01
Subjects:	cigs thin film rf magnetron sputtering oblique angle substrate temperature columnar structure optical property
Online Access:	https://dergipark.org.tr/en/download/article-file/2918763