DLC Films Grown On Steel Using An Innovator Active Screen System For PECVD Technique

In this work, an active screen plasma discharge system based technology was incorporated in a PECVD reactor for DLC films growth, making it a new development in DLC films deposition. In this case, the active screen system is used to seek better electrons confinement, which might result in high ions...

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Bibliographic Details
Published in:Materials Research
Main Authors: Patrícia Cristiane Santana da Silva, Marco Antonio Ramirez Ramos, Evaldo José Corat, Vladimir Jesus Trava-Airoldi
Format: Article
Language:English
Published: Associação Brasileira de Metalurgia e Materiais (ABM); Associação Brasileira de Cerâmica (ABC); Associação Brasileira de Polímeros (ABPol) 2016-07-01
Subjects:
Active Screen
DLC
PECVD
Adhesion
Online Access:http://www.scielo.br/pdf/mr/v19n4/1516-1439-mr-1980-5373-MR-2015-0456.pdf

Internet

http://www.scielo.br/pdf/mr/v19n4/1516-1439-mr-1980-5373-MR-2015-0456.pdf

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