Research on inspection method of metalens based on phase-shifting interference

With the ultra-thin thickness and excellent performance, metalens are bi-dimensional optical elements composed of nanopatterned structures that demonstrate significant potential for various applications such as holography, planar imaging and tomography. However, the small size of metalens makes it c...

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Bibliographic Details

Published in:	Results in Physics
Main Authors:	Wei-Han Li, Zhi-Hao Wang, Cheng-Gang Mo, Yong-Bo Deng, Cheng-Miao Wang, Yu Jiao, Yang Gao, Si-Yuan Yao, Xiaokun Wang, Xin Zhang, Liang Miao, Xin-Dong Chen
Format:	Article
Language:	English
Published:	Elsevier 2024-03-01
Subjects:	Metalens Phase-shift interferometry Wavefront aberration
Online Access:	http://www.sciencedirect.com/science/article/pii/S2211379724000755