Effect of Sr and La co-doping on structural and electrical properties of RF sputtered PZT thin films

Doping in lead-zirconate-titanate (PZT) thin films is on the rise for next generation micro-electro-mechanical systems (MEMS) and energy harvesting applications, owing to their improved ferroelectric and piezoelectric properties. Strontium, lanthanum and neodymium like elements are the most exploite...

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Bibliographic Details
Published in:Materials Research Express
Main Authors: M Kathiresan, C Manikandan, S Premkumar, E Varadarajan, V Natarajan, M K Jayaraj, T Santhanakrishnan
Format: Article
Language:English
Published: IOP Publishing 2020-01-01
Subjects:
doped PZT
thin film
RF sputtering
Sr and La doping
Online Access:https://doi.org/10.1088/2053-1591/ab6e80

Internet

https://doi.org/10.1088/2053-1591/ab6e80

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