A Strategy for Extracting Full Material Coefficients of AlN Thin Film Based on Resonance Method

AlN thin film is widely used in piezoelectric MEMS devices, and the accurate characterizations of its material coefficients are critical for the optimization of the AlN thin film process and the design of AlN thin-film-based devices. However, it is difficult to extract the material coefficients of A...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Chen Wang, Yang Yang, Lifeng Qin, Shenglin Ma, Yufeng Jin
Format:	Article
Language:	English
Published:	MDPI AG 2022-03-01
Subjects:	AlN thin film material coefficients resonance method mass loading effect de-embedding pad
Online Access:	https://www.mdpi.com/2072-666X/13/4/513