Hybrid Actuation MEMS Micromirror with Decoupled Piezoelectric Fast Axis and Electromagnetic Slow Axis for Crosstalk Suppression

Electromagnetic micro-electro-mechanical system (MEMS) micromirrors are widely used in optical scanning systems but often encounter mechanical crosstalk due to the use of shared drive coils. This phenomenon leads to parasitic motion along the slow axis during fast-axis operation, resulting in undesi...

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Bibliographic Details
Published in:Micromachines
Main Authors: Haoxiang Li, Jiapeng Hou, Zheng Gong, Huijun Yu, Yue Liu, Wenjiang Shen
Format: Article
Language:English
Published: MDPI AG 2025-09-01
Subjects:
hybrid actuation
piezoelectric actuator
PZT (lead zirconate titanate)
LiDAR
Online Access:https://www.mdpi.com/2072-666X/16/9/1072

Internet

https://www.mdpi.com/2072-666X/16/9/1072

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