Fabrication of h-BN solar-blind ultraviolet detectors by RF magnetron sputtering

Hexagonal boron nitride (h-BN) has become a popular material in solar-blind ultraviolet (SBUV) detection due to its ultra-wide bandgap, high optical absorption coefficient, high breakdown field strength and high thermal conductivity. However, the high deposition temperature restricts the choice of h...

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Bibliographic Details

Published in:	Next Materials
Main Authors:	Cheng Wu, Zhaojie Zhu, Jianfu Li, Chaoyang Tu, Peiwen Lv, Yan Wang
Format:	Article
Language:	English
Published:	Elsevier 2024-04-01
Subjects:	H-BN Thin film RF magnetron sputtering Room temperature SBUV detector
Online Access:	http://www.sciencedirect.com/science/article/pii/S2949822823000758