A Large Range Flexure-Based Servo System Supporting Precision Additive Manufacturing

This paper presents the design, development, and control of a large range beam flexure-based nano servo system for the micro-stereolithography (MSL) process. As a key enabler of high accuracy in this process, a compact desktop-size beam flexure-based nanopositioner was designed with millimeter range...

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Bibliographic Details

Published in:	Engineering
Main Authors:	Zhen Zhang, Peng Yan, Guangbo Hao
Format:	Article
Language:	English
Published:	Elsevier 2017-10-01
Subjects:	Precision additive manufacturing Micro-stereolithography Nanopositioning Beam flexure
Online Access:	http://www.sciencedirect.com/science/article/pii/S2095809917307233