Demonstration of Ultra-High-Q Silicon Microring Resonators for Nonlinear Integrated Photonics

A reflowing photoresist and oxidation smoothing process is used to fabricate ultra-high-Q silicon microring resonators based on multimode rib waveguides. Over a wide range of wavelengths near 1550 nm, the average Q-factor of a ring with 1.2-μm-wide waveguides reaches up to 1.17 × 10<sup>6</...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Desheng Zeng, Qiang Liu, Chenyang Mei, Hongwei Li, Qingzhong Huang, Xinliang Zhang
Format:	Article
Language:	English
Published:	MDPI AG 2022-07-01
Subjects:	Q-factor SOI microring resonator four-wave mixing conversion efficiency
Online Access:	https://www.mdpi.com/2072-666X/13/7/1155