Fabrication and characterization of NbTi microwave superconducting resonators

Superconducting resonators are widely used in fields spanning from quantum computing to electron spin resonance (ESR) spectroscopy. With the goal of realizing superconducting resonators, a broad variety and combination of superconducting materials, substrates and fabrication processes have been used...

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Bibliographic Details

Published in:	Micro and Nano Engineering
Main Authors:	Roberto Russo, André Chatel, Nergiz Şahin Solmaz, Reza Farsi, Hernán Furci, Juergen Brugger, Giovanni Boero
Format:	Article
Language:	English
Published:	Elsevier 2023-06-01
Subjects:	Superconducting resonators NbTi Microfabrication Direct photolitography Ion beam etching
Online Access:	http://www.sciencedirect.com/science/article/pii/S2590007223000333