Optimizing the refrigerants in ultra-low temperature Semiconductor processing chiller with mixed Refrigerant
Mixed refrigerant (MR) Cascade Refrigeration Systems are widely employed in industries requiring both extremely low temperatures and large cooling capacity, such as semiconductors and displays. The composition of the MR has a significant impact on the performance of the cascade refrigeration systems...
| 出版年: | Case Studies in Thermal Engineering |
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| 主要な著者: | , , |
| フォーマット: | 論文 |
| 言語: | 英語 |
| 出版事項: |
Elsevier
2024-09-01
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| 主題: | |
| オンライン･アクセス: | http://www.sciencedirect.com/science/article/pii/S2214157X24008955 |