Improved Thermal Resistance and Electrical Conductivity of a Boron-Doped DLC Film Using RF-PECVD

Diamond-like carbon (DLC) film doped with boron has unique properties and displays higher thermal resistance, lower internal stress, and better electrical conductivity than un-doped DLC film; this makes it is suitable for various applications, especially in outer space. Radio-frequency plasma-enhanc...

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書誌詳細

出版年:	Frontiers in Materials
主要な著者:	Wanrong Li, Xing Yan Tan, Yeong Min Park, Dong Chul Shin, Dae Weon Kim, Tae Gyu Kim
フォーマット:	論文
言語:	英語
出版事項:	Frontiers Media S.A. 2020-07-01
主題:	DLC boron-doped RF-PECVD thermal treatment electrical resistance
オンライン･アクセス:	https://www.frontiersin.org/article/10.3389/fmats.2020.00201/full