Micro-spring force sensors using conductive photosensitive resin fabricated via two-photon polymerization

Abstract The rapid miniaturization of electronic devices has fueled unprecedented demand for flexible, high-performance sensors across fields ranging from medical devices to robotics. Despite advances in fabrication techniques, the development of micro- and nano-scale flexible force sensors with sup...

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Bibliographic Details

Published in:	Microsystems & Nanoengineering
Main Authors:	Ningning Hu, Yucheng Deng, Lujia Ding, Lijun Men, Wenjun Zhang, Ruixue Yin
Format:	Article
Language:	English
Published:	Nature Publishing Group 2025-08-01
Online Access:	https://doi.org/10.1038/s41378-025-00975-7