Investigation of plasma characteristics of center region of post cylindrical magnetron sputtering device
A d.c. magnetron sputtering system was designed and fabricated. The chamber of this system is consisted from two copper coaxial cylinders. The inner one used as the cathode and the outer one used as anode with magnetic coil located on the outer cylinder (anode). The axial behavior of the magnetic f...
| Published in: | Iraqi Journal of Physics |
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| Main Author: | |
| Format: | Article |
| Language: | English |
| Published: |
University of Baghdad
2010-10-01
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| Subjects: | |
| Online Access: | https://ijp.uobaghdad.edu.iq/index.php/physics/article/view/860 |