MEMS Underwater Directional Acoustic Sensor in Near Neutral Buoyancy Configuration

A MEMS directional acoustic sensor housed in an air cavity and operated underwater in a near-neutral buoyancy configuration is demonstrated. The sensor consists of two wings connected by a bridge and attached to a substrate by two centrally mounted torsional legs. The frequency response showed two r...

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Bibliographic Details
Published in:Sensors
Main Authors: Fabio Alves, Jaehyun Park, Leland McCarty, Renato Rabelo, Gamani Karunasiri
Format: Article
Language:English
Published: MDPI AG 2022-02-01
Subjects:
Online Access:https://www.mdpi.com/1424-8220/22/4/1337