MEMS Underwater Directional Acoustic Sensor in Near Neutral Buoyancy Configuration
A MEMS directional acoustic sensor housed in an air cavity and operated underwater in a near-neutral buoyancy configuration is demonstrated. The sensor consists of two wings connected by a bridge and attached to a substrate by two centrally mounted torsional legs. The frequency response showed two r...
| Published in: | Sensors |
|---|---|
| Main Authors: | , , , , |
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-02-01
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| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/22/4/1337 |
