Towards the Growth of Hexagonal Boron Nitride on Ge(001)/Si Substrates by Chemical Vapor Deposition

The growth of hexagonal boron nitride (hBN) on epitaxial Ge(001)/Si substrates via high-vacuum chemical vapor deposition from borazine is investigated for the first time in a systematic manner. The influences of the process pressure and growth temperature in the range of 10⁻⁷–...

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Bibliographic Details

Published in:	Nanomaterials
Main Authors:	Max Franck, Jaroslaw Dabrowski, Markus Andreas Schubert, Christian Wenger, Mindaugas Lukosius
Format:	Article
Language:	English
Published:	MDPI AG 2022-09-01
Subjects:	hexagonal boron nitride 2D materials chemical vapor deposition DFT borazine
Online Access:	https://www.mdpi.com/2079-4991/12/19/3260