Individual Microparticle Manipulation Using Combined Electroosmosis and Dielectrophoresis through a Si₃N₄ Film with a Single Micropore

Porous dielectric membranes that perform insulator-based dielectrophoresis or electroosmotic pumping are commonly used in microchip technologies. However, there are few fundamental studies on the electrokinetic flow patterns of single microparticles around a single micropore in a thin dielectric fil...

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Bibliographic Details

Published in:	Micromachines
Main Authors:	Chenang Lyu, Leo Lou, Matthew J. Powell-Palm, Gideon Ukpai, Xing Li, Boris Rubinsky
Format:	Article
Language:	English
Published:	MDPI AG 2021-12-01
Subjects:	microparticle manipulation electro osmosis dielectrophoresis dielectric film micropore
Online Access:	https://www.mdpi.com/2072-666X/12/12/1578