Wafer−Scale Growth of Fe−Doped Hexagonal Boron Nitride (hBN) Films via Co−Sputtering

Fe−doped hBN film has great potential for use in spintronic applications. The wafer scale preparation of Fe−doped hBN films and their material properties are crucial for application in devices. In this work, Fe−doped films with 2−inch wafer scale were fabricated by magnetron co−sputtering, and the p...

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Bibliographic Details

Published in:	Crystals
Main Authors:	Qiang Li, Qifan Zhang, Ransheng Chen, Haoran Zhang, Mingdi Wang, Jingping Zhu, Xiaoliang Wang, Yuhuai Liu, Feng Yun
Format:	Article
Language:	English
Published:	MDPI AG 2022-05-01
Subjects:	hexagonal boron nitride magnetron sputtering Fe doping film
Online Access:	https://www.mdpi.com/2073-4352/12/6/777