System-level modeling with temperature compensation for a CMOS-MEMS monolithic calorimetric flow sensing SoC

Abstract We present a system-level model with an on-chip temperature compensation technique for a CMOS-MEMS monolithic calorimetric flow sensing SoC. The model encompasses mechanical, thermal, and electrical domains to facilitate the co-design of a MEMS sensor and CMOS interface circuits on the EDA...

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Bibliographic Details

Published in:	Microsystems & Nanoengineering
Main Authors:	Linze Hong, Ke Xiao, Xiangyu Song, Liwei Lin, Wei Xu
Format:	Article
Language:	English
Published:	Nature Publishing Group 2025-01-01
Online Access:	https://doi.org/10.1038/s41378-024-00853-8