A Mode-Localized Micro-Electromechanical System Accelerometer with Force Rebalance Closed-Loop Control

This article proposes a force rebalance control scheme based on a mode-localized resonant accelerometer (ML-RXL), which is applied to address the limited measurement range problem of the ML-RXL. For the first time, an empirical response model of the weakly coupling resonators for the amplitude ratio...

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Bibliographic Details
Published in:Micromachines
Main Authors: Bowen Wang, Zhenxiang Qi, Kunfeng Wang, Zhaoyang Zhai, Zheng Wang, Xudong Zou
Format: Article
Language:English
Published: MDPI AG 2025-02-01
Subjects:
MEMS accelerometer
mode localization
amplitude ratio
force rebalance
Online Access:https://www.mdpi.com/2072-666X/16/3/248

Internet

https://www.mdpi.com/2072-666X/16/3/248

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